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Turbo Pump Repair & Overhaul

弊社では、ターボ分子ポンプとターボコントローラの修理業務を開始しました。
AlcatelTurboPump, EbaraTurboPump, LeyboldTurboPump, MitsubishiTurboPump, OsakaTurboPump,
PfeifferTurboPump, ShimazuTorboPump, UlvacTurboPump, VarianTurboPump,

ターボ分子ポンプ修理対応機種

Model
PN / MN
Alcatel Turbo Pump
(Pfeiffer Merged)
ATP100/ATP150/ATP400/ATP900/ATP5400/ATP5900
ATH400H/ATH1300M/ATH1600M /ATH2300M
MDP5011
PTM5150 / 5400
Model
PN / MN
Ebara Turbo Pump
ET300WS/ET300C/ET300P/ET300UZ/ET450WS
 
ET600WS / ET800H /ET800WS / ET801H / ET1600WA
 
Model
PN / MN
Edwards Turbo Pump
STP-300 / STP-301 / STP-400 / STP-451 / STP-600
 
STP-603 / STP-1000 / STP-1003 / STP-2000
 
STP-A803C / STP-A1303 / STP-A1603C / STP-A2203C
 
STP-A2503C / STP-A3503C
STP-H200C / STP-H300C / STP-H301C  / STP-H600C
STP-H803C / STP-H1000C / STP-H1301C / STP-H1303C
STP-H2000C / STP-H2001K1B / STP-H2002C
STP-XH2603C / STP-XA2703C / STP-XH3203C
Model
PN / MN
Leybold Turbo Pump
TMP-35/TMP-50/TMP-151/TMP-361C/TMP-450C
TMP-600C/TMP-1000/TMP-1100C/TMP-1500C
TW-250/TW-250S/TW-700/TW-701
T-1600
MAG-340/MAG-400/MAG-900/MAG-1200/MAG-2000C
MAGW830/MAGW1300/MAGW1500/MAGW2000
MAGW2010/MAGW2200C/MAGW2800/MAGW3200
Model
PN / MN
Mitsubishi Turbo Pump
PT-50/PT-150/PT-300/PT-500/PT-1500
FT-700/FT-700WS/FT-800W/FT-1001FW/FT-1200W
FT-1400W/FT-2200W/FT-2300W/FT-3300W/FT-3301W
Model
PN / MN
Osaka Tubo Pump
TF-160/TH-160/TH-520/TH-3603
TG-50/TG-133/TG-220/TG-350/TG-370/TG-373/TG-374
TG-550/TG-800/TG-815/TG-900/TG-1100/TG-1110
TG-1113/TG-1300/TG-1303/TG-2000/TG-2001/TG-2003
TG-2203/TG-2300/TG-2400/TG-3213/TG-3220/TG-3410
TG-3460/TG-5500
TS-443
Model
PN / MN
Pfeiffer Turbo Pump
TMH-063/TMH-064/TMH-071/TMH-260/TMH-261
 
TMH262/TMH520/TMH521/TMH1001/TMH1600/TMH1601
TPH050/TPH060/TPh170/TPH190/TPH220/TPH240
TPH510/TPh520M/TPH521/TPH1201/TPH1501/TPH1600
TPH2101/TPH2200/TPH2201/TPH2301
TDP-022
Model
PN / MN
Shimadzu Turbo Pump
TMP202LM/TMp203LM/TMP303LM/TMP403LM/TMP803LM
TMP1002LM/TMP1003LM/TMP1103LM/TMP1704LM
TMP2001LM/TMP2003LM/TMP2203LM/TMP3001LM
TMP3003LM/TMP3203LM/TMP3304LM
TMP3403LM/TMP-H3603LMC
TMP200/TMP280/TMP550/TMP100/TMP1500
Model
PN / MN
Uivac Turbo Pump
UTM50/UTM150/UTM300/UTM350FW/UTM480FW
UTM800FW/UTM1001FW/UTM1200FW/UTM1400FW
UTM2300FW/UTM3301FW/UTM3302FW/UTM3303FW
Model
PN / MN
Varian Turbo Pump
TV70/TV200/TV250/TV300/TV301/TV450/TV550
TV551/TV701/TV801/TV1000/TV1001/TV1800
TV-2000/TV-3000
 
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