MKS ENI GHW 修理対応機種
Model | PN / MN | Frequency | Power |
GHW-12A | 0190-06990 | 13.56Mhz | 1250W |
GHW12A-130F2N0-001 | |||
GHW-12Z | 0190-06988 | 1250W | |
GHW12Z-13DF2N0-001 | |||
GHW-25 | GEW2527MA-B1C00-L1 | 2500W | |
ID80-090011-12 | |||
GHW25A-13DF3N0-001 | |||
GHW-25A | GHW-25A-13DF3N0-001 | 2500W | |
GHW-50 | GHW50A-13DF3H0-M12 | 5000W | |
GHW-50A | GHW50A-13DF3H0-003 | 5000W | |
GHW-50A13DF3H0-10 | |||
NOVA-25 | 2.00Mhz | 2500W | |
NOVA-50 | 2.00Mhz | 5000W |