Books AQR7
ATR8_Lam
ATR8_Nvls
ATR7_Nvls
Brooks MAG7
Brooks MTR5
Brooks MAG8
Traverser
002-8761-05
ATR7 Controller
AQR7 Controller
ATR8 Controller
MAG7 Armset
MTR5 ArmSet
Brooks Robot 修理対応機種
Vacuum | |||
型 式 | Repair | Overhaul | Exchange |
MTR5 Drive_Nvls | OK | OK | OK |
MTR5 ArmSet_Nvls | OK | OK | OK |
MTR5 Drive_Lam | OK | OK | OK |
MTR5 ArmSet_Lam | OK | OK | OK |
Vacuum | |||
型 式 | Repair | Overhaul | Exchange |
MAG7 Drive_Nvls 200 / 300 | OK | OK | OK |
MAG7 ArmSet_Nvls 200 / 300 | OK | OK | OK |
MAG7 Drive_Lam 200 / 300 | OK | OK | OK |
MAG7 ArmSet_Lam 200 / 300 | OK | OK | OK |
MAG7 Drive 200 / 300 | OK | OK | OK |
MAG7 ArmSet 200 / 300 | OK | OK | OK |
Atmosphere | |||
型 式 | Repair | Overhaul | Exchange |
ATR7 Robot | OK | OK | OK |
ATR7 ArmSet | OK | OK | OK |
ATR7 Controller | OK | OK | |
AQR7 Robot | OK | OK | OK |
AQR7 ArmSet | OK | OK | OK |
AQR7 Controller | OK | OK | |
Atmosphere | |||
型 式 | Repair | Overhaul | Exchange |
ATR8 Robot_Nvls | OK | OK | OK |
ATR8 Controller_Nvls | OK | OK | |
ATR8 Robot_Lam | OK | OK | OK |
ATR8 Controller_Lam | OK | ||
Novellus Robot | |||
型 式 | Repair | Overhaul | Exchange |
ATR8 Traverser | OK | OK | OK |
LTM Type 2 | OK | OK | |
Trust Controller | OK | ||
Indexer | OK | OK | |
Vortex | OK | OK | |
Servo Spindle | OK | OK | |
Lift Module | OK | OK | |