Novellus C3 Unit ｜アローズエンジニアリング株式会社｜半導体製造装置関連｜半導体装置周辺機器の修理｜瞬低保護装置(VSP)

C3 VECTOR SPINDLE オーバーホール

300MM SPINDLE ASSEMBLY

1. SIZE : 300 MM
2. PROCESS : CVD
3.  EQUIPMENT: C3 VECTOR, ALTUS
4. CUSTOMER: NOVELLUS
5. SCOPE: ALL ASSEMBLY, REFURB”
6. MAIN COMPOSITION
   1) BELLOWS ASSY
   2) FERRO SEAL
   3) INDEX DRIVE
   4) CYLINDER

C3 FEDESTAL ASSEMBLY オーバーホール

C3 FEDESTAL ASSEMBLY

1.   SIZE : 300 MM
2.   PROCESS : CVD
3.   EQUIPMENT: C3 VECTOR,
                C3 ALTUS, C3 INOVA
4.   CUSTOMER : NOVELLUS
5.   SCOPE: ALL ASSEMBLY, OVERHAUL
6.   MAIN COMPOSITION
     1) BELLOWS ASSY
     2) CYLINDER ASSEMBLY

C3 LIFT PIN ASSEMBLY オーバーホール

LIFT PIN ASSEMBLY (1)

1.   SIZE : 300 MM
2.   PROCESS : CVD
3.   EQUIPMENT: C3
4.   CUSTOMER: NOVELLUS
5.   SCOPE: ALL ASSEMBLY, OVERHAUL
6.   MAIN COMPOSITION
     1) BELLOWS ASSY
     2) CYLINDER ASSEMBLY

LIFT PIN ASSEMBLY (2)

1.   SIZE : 300MM
2.   PROCESS : CVD
3.   EQUIPMENT: C3 VECTOR
4.   CUSTOMER: NOVELLUS
5.   SCOPE: ALL ASSEMBLY, OVERHAUL
6.   MAIN COMPOSITION
     1) BELLOWS ASSY
     2) CYLINDER ASSEMBLY