MKS AX7657
MKS AX7670
MKS AX7685
MKS AX7645
MKS RPS 修理対応機種
Tool | PN / MN | Model Name | Item Project |
MKS ASTRON TM(2L) | 0920-01120 | AX7650 | AMT Producer / AKT |
0920-00013 | AX7651 | ||
0929-00013 | AX7657 | ||
AX7851 | |||
FI20120 | |||
0920-00013 | FI20620 | ||
FI26201 |
Tool | PN / MN | Model Name | Item Project |
MKS ASTRON I(3L) | 0920-00100 | AX7670 | AMT Producer / AKT |
Tool | PN / MN | Model Name | Item Project |
MKS ASTRON ex(4L) | FI80131 | AMT Producer / AKT |
Tool | PN / MN | Model Name | Item Project |
MKS ASTRON ex(6L) | 0920-00057 | FI80131 | AMT Producer/AKT/NOVELLUS |
0920-01119 | FI80133 | ||
AX7685 |
Tool | PN / MN | Model Name | Item Project |
MKS ASTRON ex(8L) | AX7685 | AMT Producer/AKT NOVELLUS | |
FI80132 |
Tool | PN / MN | Model Name | Item Project |
MKS ASTRON hf(15L) | 0190-72072 | FI80146 | AKT |
MKS ASTRON hf-S(15L) | AX7645 | NOVELLUS |
Tool | PN / MN | Model Name | Item Project |
MKS ASTRON hf+(22L) | AX7635 |
Tool | PN / MN | Model Name | Item Project |
MKS ASTRON hf++(30L) | AX7667 |