Turbo Pump Repair & Overhaul
弊社では、ターボ分子ポンプとターボコントローラの修理業務を開始しました。
AlcatelTurboPump, EbaraTurboPump, LeyboldTurboPump, MitsubishiTurboPump, OsakaTurboPump,
PfeifferTurboPump, ShimazuTorboPump, UlvacTurboPump, VarianTurboPump,
ターボ分子ポンプ修理対応機種
Model | PN / MN | |
Alcatel Turbo Pump (Pfeiffer Merged) | ATP100/ATP150/ATP400/ATP900/ATP5400/ATP5900 | |
ATH400H/ATH1300M/ATH1600M /ATH2300M | ||
MDP5011 | ||
PTM5150 / 5400 |
Model | PN / MN | |
Ebara Turbo Pump | ET300WS/ET300C/ET300P/ET300UZ/ET450WS | |
ET600WS / ET800H /ET800WS / ET801H / ET1600WA |
Model | PN / MN | |
Edwards Turbo Pump | STP-300 / STP-301 / STP-400 / STP-451 / STP-600 | |
STP-603 / STP-1000 / STP-1003 / STP-2000 | ||
STP-A803C / STP-A1303 / STP-A1603C / STP-A2203C | ||
STP-A2503C / STP-A3503C | ||
STP-H200C / STP-H300C / STP-H301C / STP-H600C | ||
STP-H803C / STP-H1000C / STP-H1301C / STP-H1303C | ||
STP-H2000C / STP-H2001K1B / STP-H2002C | ||
STP-XH2603C / STP-XA2703C / STP-XH3203C |
Model | PN / MN | |
Leybold Turbo Pump | TMP-35/TMP-50/TMP-151/TMP-361C/TMP-450C | |
TMP-600C/TMP-1000/TMP-1100C/TMP-1500C | ||
TW-250/TW-250S/TW-700/TW-701 | ||
T-1600 | ||
MAG-340/MAG-400/MAG-900/MAG-1200/MAG-2000C | ||
MAGW830/MAGW1300/MAGW1500/MAGW2000 | ||
MAGW2010/MAGW2200C/MAGW2800/MAGW3200 |
Model | PN / MN | |
Mitsubishi Turbo Pump | PT-50/PT-150/PT-300/PT-500/PT-1500 | |
FT-700/FT-700WS/FT-800W/FT-1001FW/FT-1200W | ||
FT-1400W/FT-2200W/FT-2300W/FT-3300W/FT-3301W |
Model | PN / MN | |
Osaka Tubo Pump | TF-160/TH-160/TH-520/TH-3603 | |
TG-50/TG-133/TG-220/TG-350/TG-370/TG-373/TG-374 | ||
TG-550/TG-800/TG-815/TG-900/TG-1100/TG-1110 | ||
TG-1113/TG-1300/TG-1303/TG-2000/TG-2001/TG-2003 | ||
TG-2203/TG-2300/TG-2400/TG-3213/TG-3220/TG-3410 | ||
TG-3460/TG-5500 | ||
TS-443 |
Model | PN / MN | |
Pfeiffer Turbo Pump | TMH-063/TMH-064/TMH-071/TMH-260/TMH-261 | |
TMH262/TMH520/TMH521/TMH1001/TMH1600/TMH1601 | ||
TPH050/TPH060/TPh170/TPH190/TPH220/TPH240 | ||
TPH510/TPh520M/TPH521/TPH1201/TPH1501/TPH1600 | ||
TPH2101/TPH2200/TPH2201/TPH2301 | ||
TDP-022 |
Model | PN / MN | |
Shimadzu Turbo Pump | TMP202LM/TMp203LM/TMP303LM/TMP403LM/TMP803LM | |
TMP1002LM/TMP1003LM/TMP1103LM/TMP1704LM | ||
TMP2001LM/TMP2003LM/TMP2203LM/TMP3001LM | ||
TMP3003LM/TMP3203LM/TMP3304LM | ||
TMP3403LM/TMP-H3603LMC | ||
TMP200/TMP280/TMP550/TMP100/TMP1500 |
Model | PN / MN | |
Uivac Turbo Pump | UTM50/UTM150/UTM300/UTM350FW/UTM480FW | |
UTM800FW/UTM1001FW/UTM1200FW/UTM1400FW | ||
UTM2300FW/UTM3301FW/UTM3302FW/UTM3303FW |
Model | PN / MN | |
Varian Turbo Pump | TV70/TV200/TV250/TV300/TV301/TV450/TV550 | |
TV551/TV701/TV801/TV1000/TV1001/TV1800 | ||
TV-2000/TV-3000 |