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Novellus MC1, MC3, IOC Repair Services

We can check the operation of MC1, MC3, and IOC removed from the equipment individually.
By independently communicating with the developed device by our company, it is possible to perform the operation check test and repair of the single unit under the same conditions as the customer's device.
Please note that device manufacturers have discontinued MC1/MC2 support, so please feel free to contact us.

MC1/MC3/IOC repair

Controller configuration

    (Standard machine)
                SystemController 02-113640-00
                ModulesController (DLCM) 02-116798-00

                Cheese PC                          02-028034-00

    (Express(Unit No.)
                System
Controller 02-127707-00
                ModulesController (DLCM) 02-128745-00

                Cheese PC                          02-136488-00

                ModulesController (DCVD) 02-034310-00

 

 

 

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