Novellus C3 Unit ｜ Arrows Engineering Co., Ltd. ｜ Semiconductor manufacturing equipment related ｜ Repair of semiconductor equipment peripherals ｜ Instantaneous low protection device (VSP) ｜ Sales of inspection equipment and microscopes

C3 VECTOR SPINDLE overhaul

300MM SPINDLE ASSEMBLY

1. SIZE: 300 MM
2. PROCESS: CVD
3.  EQUIPMENT: C3 VECTOR, ALTUS
4. CUSTOMER: NOVELLUS
5. SCOPE: ALL ASSEMBLY, REFURB ”
6. MAIN COMPOSITION
   1) BELLOWS ASSY
   2) FERRO SEAL
   3) INDEX DRIVE
   4) CYLINDER

C3 FEDESTAL ASSEMBLY overhaul

C3 FEDESTAL ASSEMBLY

1.   SIZE: 300 MM
2.   PROCESS: CVD
3.   EQUIPMENT: C3 VECTOR,
                C3 ALTUS, C3 INOVA
4.   CUSTOMER: NOVELLUS
5.   SCOPE: ALL ASSEMBLY, OVERHAUL
6.   MAIN COMPOSITION
     1) BELLOWS ASSY
     2) CYLINDER ASSEMBLY

C3 LIFT PIN ASSEMBLY overhaul

LIFT PIN ASSEMBLY (1)

1.   SIZE: 300 MM
2.   PROCESS: CVD
3.   EQUIPMENT: C3
4.   CUSTOMER: NOVELLUS
5.   SCOPE: ALL ASSEMBLY, OVERHAUL
6.   MAIN COMPOSITION
     1) BELLOWS ASSY
     2) CYLINDER ASSEMBLY

LIFT PIN ASSEMBLY (2)

1.   SIZE: 300MM
2.   PROCESS: CVD
3.   EQUIPMENT: C3 VECTOR
4.   CUSTOMER: NOVELLUS
5.   SCOPE: ALL ASSEMBLY, OVERHAUL
6.   MAIN COMPOSITION
     1) BELLOWS ASSY
     2) CYLINDER ASSEMBLY