Use of Cleanrooms
Since we use our own cleanrooms, we can provide speedy response.
Equipment contents
2 clean rooms (class 1000, 0,5 μm or more)
Room dimensions Ceiling height 3000mm Area 160M²
Temperature conditions Summer, winter 23 ℃ ± 2 ℃
Humidity conditions Summer, winter 50% ± 10%
Room pressure 10~20Pa
2 helium leak detectors
Power supply 200V 3-phase 1 floor MAX125A
１ dew point meter
Cooling water circulation device (271 / min, 500cal)
Clean room drawings
