MKS Revoluion repair compatible models
tool | PN/MN | Model Name | Item Project |
MKS Revolution (6L) | 685-045803-023 | AX7690LAM-23 | Lam Research |
685-045803-034 | AX7695LAM-10 | ||
MKS Revolution Series Repair Services
tool | PN/MN | Model Name | Item Project |
MKS Revolution (6L) | 685-045803-023 | AX7690LAM-23 | Lam Research |
685-045803-034 | AX7695LAM-10 | ||