Complete set of standard accessories
○ 4 ”TFT Color Touch Panel + Box + 1 set of mounting arm
○ 11,17,18 MFC Signal Cable Assy (S-CA6B / E)
○ LL Door Closed Sensor Signal Cable (S-CA21B & C) 1
○ One Main Power Cable (PW-CA1)
○ One Touch Panel Power Cable (PW-CA2)
○ One Touch Panel Signal Cable (S-CA1)
○ One installation manual
○ One instruction manual (this manual)
Overview
□Purpose of Gas Economizer (1)
A2 SiH4 during Wafer transfer during Deposition Sequence of Concept One Dielectric device
Gas is sent to the Pump side through the Divert Line with the same flow rate setting as at Deposition.
The Gas Economizer Unit stops the A2 SiH4 Gas flowing to the Pump side during Wafer transport.
It is designed for the purpose of reducing A2 SiH4 Gas during Deposition Sequence.
1.Wafer It is considered possible to reduce the amount of products in the piping by stopping A2 SiH4 Gas during transportation.
2.By stopping A2 SiH4 Gas during wafer transfer,
It is thought that the load on the Dry Pump can be reduced and the maintenance cycle can be improved.
3.By stopping A2 SiH4 Gas during wafer transfer,
It is thought that the load on the abatement device can be reduced and the maintenance cycle can be improved.
□Purpose of Gas Economizer (2)
B6 NH3 Gas is used during Wafer transfer during the Deposition Sequence of the Concept One Dielectric device.
It is flowing into the reactor chamber with the same flow rate setting as at the time of Deposition.
1.Gas Economizer Unit
By adjusting the flow rate of B6 NH3 Gas flowing to the reactor chamber side during Wafer transfer,
It is designed to reduce B6 NH3 Gas during Deposition Sequence.
2.For the purpose of A2,B1,B2,B5,B6 Gas Economizer Unit,
A2 and B6 are taken as an example, but since they have the same function for all Gas,
It is designed to be flexible.
Feature
In designing the Gas Economizer Unit, it is conceived that all controls are integrated into this unit so that it only needs to be connected so that complicated modifications to the equipment (modifications such as Board) are not required. .. Since the installation time of Gas Economizer Unit can be shortened, it is possible to minimize the equipment down time during the modification. Since no complicated modification of the equipment is required, it is possible to install the Gas Economizer Unit and restore the equipment state before modification.
The Gas Economizer Unit has a Disable/Enable selection function so that the Economizer Mode can be selected, and it is possible to easily change between used and unused. When a problem occurs in the equipment, the Gas Economizer Unit can be easily separated, so it is possible to easily identify the trouble content. When removing Gas manually for maintenance etc., you can use Divert Line by disabling Gas Economizer Unit.
