When you send out the repaired product, attach this repair request form.
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SMC SLIT Valve Genuine Repair Certificate
Overview
○ Under the contract with SMC, we will repair based on the original repair contents and test contents.
(It will be a repair agency business.)
○We have completed a repair training course at SMC Tsukuba Development Center.
(It will be a repair agency business.)
○We have completed a repair training course at SMC Tsukuba Development Center.
details of repair
1. This repair will be performed using the same repair contents, jigs and tools as SMC.
2. SLIT VALVE is currently released from Rev 0, but at the time of repair, we will replace it with the latest Rev Parts.
2. SLIT VALVE is currently released from Rev 0, but at the time of repair, we will replace it with the latest Rev Parts.
By using the improved parts, you can expect the effect of extending the life time of SLIT VALVE.
3.For repairs, we will submit a quotation in advance. Since the man-hours vary depending on the state when SLIT VALVE is received,
3.For repairs, we will submit a quotation in advance. Since the man-hours vary depending on the state when SLIT VALVE is received,
We will inform you of the official price after the repair is completed.
4. SMC SLIT VALVE has been installed since the middle term of the film deposition equipment "Concept2" manufactured by Novellus Systems.
Some of the devices delivered before the mid-term are equipped with VAT products.
Model with 200mm device Model with 300mm device
4. SMC SLIT VALVE has been installed since the middle term of the film deposition equipment "Concept2" manufactured by Novellus Systems.
Some of the devices delivered before the mid-term are equipped with VAT products.
Model with 200mm device Model with 300mm device
Repair plan/repair details
[Standard repair]
Replacement parts: Seal kit, bellows assembly kit, gasket << common >>
Main body detoxification cleaning: Upon acceptance, detoxification cleaning fee will be automatically charged.
Operation cost
[Outside the standard repair range]
Summary: If the parts need to be replaced with standard repair + α, the following parts will be added to the standard repair.
Replacement parts: insert, bonnet, gate (O-ring), cylinder assembly
Auto switch (sensor), counter
Replacement parts: Seal kit, bellows assembly kit, gasket << common >>
Main body detoxification cleaning: Upon acceptance, detoxification cleaning fee will be automatically charged.
Operation cost
[Outside the standard repair range]
Summary: If the parts need to be replaced with standard repair + α, the following parts will be added to the standard repair.
Replacement parts: insert, bonnet, gate (O-ring), cylinder assembly
Auto switch (sensor), counter
SLIT valve repair flow
As a general rule, the delivery time is about 3-4 weeks after receiving SLIT VALVE.
As an exception to the delivery date, if you need Parts other than the normal Replacement Parts, we will contact you separately.
As a part under the influence of process gas, if you accept it for the purpose of repair or investigation, in principle, we will always detoxify and wash it.
As an exception to the delivery date, if you need Parts other than the normal Replacement Parts, we will contact you separately.
As a part under the influence of process gas, if you accept it for the purpose of repair or investigation, in principle, we will always detoxify and wash it.
Target machine type (model number)
300mm P / N
SMC P / N: XGT312-47336-2C1-X316
SMC P / N: XGT312-47336-2C1-X317
SMC P / N: XGT312-47336-2C1-X318
SMC P / N: XGT312-47336-2C1-X319
200mm P / N
SMC P / N: XGT221-32222-1C1-X175
SMC P / N: XGT221-46236-2C1-X176
SMC P / N: XGT221-46236-1C1-X177
SMC P / N: XGT200-30-2A-X177C
200 mm slit valve standard/special product
SMC P / N: XGT-0101
SMC P / N: XGT-0402
SMC P / N: XGT221-32222-1C1-X175
SMC P / N: XXGT221-46236-2C1-X176