Overview
Mounted on Varian PVD series More than 1000 units repaired
We have been repairing various units mounted on devices such as Varian PVD 3180, 3190, 3280, 3290, M2000, XM-90, XM-8, m2i, MB2-830 for many years.
About １３ years have passed since the transfer of repair work from Novellus, and we have a repair record of more than 1000 units.
FLUKE controllers 1722A, 1720A, 1780A, 415B, 6160B, whose manufacturer support has ended, are only repaired by us in Japan.
With numerous achievements in the semiconductor industry, major companies, space observatories, and universities, we will continue to challenge new creations to meet the needs of our customers.
About １３ years have passed since the transfer of repair work from Novellus, and we have a repair record of more than 1000 units.
FLUKE controllers 1722A, 1720A, 1780A, 415B, 6160B, whose manufacturer support has ended, are only repaired by us in Japan.
With numerous achievements in the semiconductor industry, major companies, space observatories, and universities, we will continue to challenge new creations to meet the needs of our customers.
List of repairable units
| ■ Varian | FLUKE 1720A, 1722A |
| Wafer Loader Control | |
| Wafer process control | |
| CMD Power Supply | |
| RF Matching Box | |
| RF Matching Control | |
| Fring Module | |
| Low Voltage Power Supply | |
| Ion Gauge Control 845,880 | |
| Vacuum System Control | |
| Cassette Motor Control |