Ozone Generator Repair & Overhaul
We have overhauled the unit according to our own program, we have improved the weak points of the equipment, etc., and we have completed the delivery which took a long time to repair in about 2 weeks and delivered it.
MKS AX8200A
MKS AX8403
MKS AX8407
MKS AX8560
Ozone Generator repair compatible models
MKS Model | Wafer size | Maker | |
CVD | AX8200A | 150 mm | AMT |
AX8200 | 200 mm | ||
AX8403A | 200 mm | ||
AX8406 | 200 mm | ||
AX8406A | 200 mm | ||
AX8407A | 300 mm |
MKS Model | Wafer size | Maker | |
Diffusion | AX8407 | 300 mm | HiKe |
AX8407HC | 300 mm | HiKe | |
AX9407SIL | 300 mm | HiKe | |
AX8560-5100 | 300 mm | KE | |
AX8560-3020 | 300 mm | IPS | |
Ozone Generator AX8407 block diagram
Ozone Generator AX8407 parts failure rate
AX8407 major failure parts
Problems of parts
1.Power Assy Board
AC Power Input Value Spec or less
2. Oscillator Board
AC Power Output Value Spec or less
3 Cells Stack
Changes in the internal properties of Cell discharge officers used for many years and Cooling Channel
Internal/inorganic substances Performance degradation due to the logging phenomenon
4.API Monitor
Reliability loss due to long-term use of UV Ramp and Sensor
Inspection and repair content
①.Hi-Pote test -----------------: Isolation check (electrical leak check)
②. Water leak check -------------: Check for water leaks in the main body and joints
③. MFC flow rate check ----------: MFC flow rate check
④. MFC display check ------------: MFC flow rate display check
⑤. Alarm test -------------------: Interlock check
⑥. Ozone concentration double check: Monitor check inside the generator
⑦. Operation test by software ------: RS-232C communication check
⑧. Line voltage test --------------: Low voltage / high voltage line voltage check
②. Water leak check -------------: Check for water leaks in the main body and joints
③. MFC flow rate check ----------: MFC flow rate check
④. MFC display check ------------: MFC flow rate display check
⑤. Alarm test -------------------: Interlock check
⑥. Ozone concentration double check: Monitor check inside the generator
⑦. Operation test by software ------: RS-232C communication check
⑧. Line voltage test --------------: Low voltage / high voltage line voltage check