Turbo Pump Repair & Overhaul
Our company has started repair work for turbo molecular pumps and turbo controllers.
Alcatel TurboPump, Ebara TurboPump, Leybold TurboPump, Mitsubishi TurboPump, Osaka TurboPump,
Pfeiffer TurboPump, ShimazuTorboPump, UlvacTurboPump, VarianTurboPump,
Models compatible with turbo molecular pump repair
Door Design | PN/MN | |
Alcatel Turbo Pump (Pfeiffer Merged) | ATP100 / ATP150 / ATP400 / ATP900 / ATP5400 / ATP5900 | |
ATH400H / ATH1300M / ATH1600M / ATH2300M | ||
CDM5011 | ||
PTM5150/5400 |
Door Design | PN/MN | |
Ebara Turbo Pump | ET300WS / ET300C / ET300P / ET300UZ / ET450WS | |
ET600WS / ET800H / ET800WS / ET801H / ET1600WA |
Door Design | PN/MN | |
Edwards Turbo Pump | STP-300 / STP-301 / STP-400 / STP-451 / STP-600 | |
STP-603 / STP-1000 / STP-1003 / STP-2000 | ||
STP-A803C / STP-A1303 / STP-A1603C / STP-A2203C | ||
STP-A2503C / STP-A3503C | ||
STP-H200C / STP-H300C / STP-H301C / STP-H600C | ||
STP-H803C / STP-H1000C / STP-H1301C / STP-H1303C | ||
STP-H2000C / STP-H2001K1B / STP-H2002C | ||
STP-XH2603C / STP-XA2703C / STP-XH3203C |
Door Design | PN/MN | |
Leybold Turbo Pump | TMP-35 / TMP-50 / TMP-151 / TMP-361C / TMP-450C | |
TMP-600C / TMP-1000 / TMP-1100C / TMP-1500C | ||
TW-250 / TW-250S / TW-700 / TW-701 | ||
T-1600 | ||
MAG-340 / MAG-400 / MAG-900 / MAG-1200 / MAG-2000C | ||
MAGW830 / MAGW1300 / MAGW1500 / MAGW2000 | ||
MAGW2010 / MAGW2200C / MAGW2800 / MAGW3200 |
Door Design | PN/MN | |
Mitsubishi Turbo Pump | PT-50 / PT-150 / PT-300 / PT-500 / PT-1500 | |
FT-700 / FT-700WS / FT-800W / FT-1001FW / FT-1200W | ||
FT-1400W / FT-2200W / FT-2300W / FT-3300W / FT-3301W |
Door Design | PN/MN | |
Osaka Tubo Pump | TF-160 / TH-160 / TH-520 / TH-3603 | |
TG-50 / TG-133 / TG-220 / TG-350 / TG-370 / TG-373 / TG-374 | ||
TG-550 / TG-800 / TG-815 / TG-900 / TG-1100 / TG-1110 | ||
TG-1113 / TG-1300 / TG-1303 / TG-2000 / TG-2001 / TG-2003 | ||
TG-2203 / TG-2300 / TG-2400 / TG-3213 / TG-3220 / TG-3410 | ||
TG-3460 / TG-5500 | ||
TS-443 |
Door Design | PN/MN | |
Pfeiffer Turbo Pump | TMH-063 / TMH-064 / TMH-071 / TMH-260 / TMH-261 | |
TMH262 / TMH520 / TMH521 / TMH1001 / TMH1600 / TMH1601 | ||
TPH050 / TPH060 / TPH170 / TPH190 / TPH220 / TPH240 | ||
TPH510 / TPH520M / TPH521 / TPH1201 / TPH1501 / TPH1600 | ||
TPH2101 / TPH2200 / TPH2201 / TPH2301 | ||
TDP-022 |
Door Design | PN/MN | |
Shimadzu Turbo Pump | TMP202LM / TMP203LM / TMP303LM / TMP403LM / TMP803LM | |
TMP1002LM / TMP1003LM / TMP1103LM / TMP1704LM | ||
TMP2001LM / TMP2003LM / TMP2203LM / TMP3001LM | ||
TMP3003LM / TMP3203LM / TMP3304LM | ||
TMP3403LM / TMP-H3603LMC | ||
TMP200 / TMP280 / TMP550 / TMP100 / TMP1500 |
Door Design | PN/MN | |
Uivac Turbo Pump | UTM50 / UTM150 / UTM300 / UTM350FW / UTM480FW | |
UTM800FW / UTM1001FW / UTM1200FW / UTM1400FW | ||
UTM2300FW / UTM3301FW / UTM3302FW / UTM3303FW |
Door Design | PN/MN | |
Varian Turbo Pump | TV70 / TV200 / TV250 / TV300 / TV301 / TV450 / TV550 | |
TV551 / TV701 / TV801 / TV1000 / TV1001 / TV1800 | ||
TV-2000 / TV-3000 |