Turbo Pump Repair & Overhaul
Our company has started repair work for turbo molecular pumps and turbo controllers.
Alcatel TurboPump, Ebara TurboPump, Leybold TurboPump, Mitsubishi TurboPump, Osaka TurboPump,
Pfeiffer TurboPump, ShimazuTorboPump, UlvacTurboPump, VarianTurboPump,
Models compatible with turbo molecular pump repair
Model | PN/MN | |
Alcatel Turbo Pump (Pfeiffer Merged) | ATP100 / ATP150 / ATP400 / ATP900 / ATP5400 / ATP5900 | |
ATH400H / ATH1300M / ATH1600M / ATH2300M | ||
CDM5011 | ||
PTM5150/5400 |
Model | PN/MN | |
Ebara Turbo Pump | ET300WS / ET300C / ET300P / ET300UZ / ET450WS | |
ET600WS / ET800H / ET800WS / ET801H / ET1600WA |
Model | PN/MN | |
Edwards Turbo Pump | STP-300 / STP-301 / STP-400 / STP-451 / STP-600 | |
STP-603 / STP-1000 / STP-1003 / STP-2000 | ||
STP-A803C / STP-A1303 / STP-A1603C / STP-A2203C | ||
STP-A2503C / STP-A3503C | ||
STP-H200C / STP-H300C / STP-H301C / STP-H600C | ||
STP-H803C / STP-H1000C / STP-H1301C / STP-H1303C | ||
STP-H2000C / STP-H2001K1B / STP-H2002C | ||
STP-XH2603C / STP-XA2703C / STP-XH3203C |
Model | PN/MN | |
Leybold Turbo Pump | TMP-35 / TMP-50 / TMP-151 / TMP-361C / TMP-450C | |
TMP-600C / TMP-1000 / TMP-1100C / TMP-1500C | ||
TW-250 / TW-250S / TW-700 / TW-701 | ||
T-1600 | ||
MAG-340 / MAG-400 / MAG-900 / MAG-1200 / MAG-2000C | ||
MAGW830 / MAGW1300 / MAGW1500 / MAGW2000 | ||
MAGW2010 / MAGW2200C / MAGW2800 / MAGW3200 |
Model | PN/MN | |
Mitsubishi Turbo Pump | PT-50 / PT-150 / PT-300 / PT-500 / PT-1500 | |
FT-700 / FT-700WS / FT-800W / FT-1001FW / FT-1200W | ||
FT-1400W / FT-2200W / FT-2300W / FT-3300W / FT-3301W |
Model | PN/MN | |
Osaka Tubo Pump | TF-160 / TH-160 / TH-520 / TH-3603 | |
TG-50 / TG-133 / TG-220 / TG-350 / TG-370 / TG-373 / TG-374 | ||
TG-550 / TG-800 / TG-815 / TG-900 / TG-1100 / TG-1110 | ||
TG-1113 / TG-1300 / TG-1303 / TG-2000 / TG-2001 / TG-2003 | ||
TG-2203 / TG-2300 / TG-2400 / TG-3213 / TG-3220 / TG-3410 | ||
TG-3460 / TG-5500 | ||
TS-443 |
Model | PN/MN | |
Pfeiffer Turbo Pump | TMH-063 / TMH-064 / TMH-071 / TMH-260 / TMH-261 | |
TMH262 / TMH520 / TMH521 / TMH1001 / TMH1600 / TMH1601 | ||
TPH050 / TPH060 / TPH170 / TPH190 / TPH220 / TPH240 | ||
TPH510 / TPH520M / TPH521 / TPH1201 / TPH1501 / TPH1600 | ||
TPH2101 / TPH2200 / TPH2201 / TPH2301 | ||
TDP-022 |
Model | PN/MN | |
Shimadzu Turbo Pump | TMP202LM / TMP203LM / TMP303LM / TMP403LM / TMP803LM | |
TMP1002LM / TMP1003LM / TMP1103LM / TMP1704LM | ||
TMP2001LM / TMP2003LM / TMP2203LM / TMP3001LM | ||
TMP3003LM / TMP3203LM / TMP3304LM | ||
TMP3403LM / TMP-H3603LMC | ||
TMP200 / TMP280 / TMP550 / TMP100 / TMP1500 |
Model | PN/MN | |
Uivac Turbo Pump | UTM50 / UTM150 / UTM300 / UTM350FW / UTM480FW | |
UTM800FW / UTM1001FW / UTM1200FW / UTM1400FW | ||
UTM2300FW / UTM3301FW / UTM3302FW / UTM3303FW |
Model | PN/MN | |
Varian Turbo Pump | TV70 / TV200 / TV250 / TV300 / TV301 / TV450 / TV550 | |
TV551 / TV701 / TV801 / TV1000 / TV1001 / TV1800 | ||
TV-2000 / TV-3000 |