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RF Generator & MatchingBox Repair Services

*Please be sure to attach a repair request form when sending the product.
  To view the PDF file, it is provided free of charge by Adobe Systems Incorporated.    RF Generator Repair Request Form

Overview

☆ Skilled technicians are working with reliable technology and advanced knowledge.
At our company, we take measures such as prolonging life by improving the weak points of the overhaul unit by our own program, not just repairing it.
By carrying out in-house repairs, we aim to reduce the burden of customer repair costs and shorten the delivery time of repaired products.
Depending on the model, we have a large number of exchange products, and we can respond immediately to customer requests, so we can reduce downtime of the equipment.
  ◎ RPS Power MonitorCan manage the Power value in real time.
   For further information, please read please use this form.here is!

List of RF Generator repair models * Click the image below for details.

Advanced Energy Pinnacle / MDX Power Supply Unit

Remote plasma Source Repair Services

RF Matching Box Repair Services

We provide RF Matching Box Repair Services for each manufacturer.
Click the unit below to see the details.
Equipment and inspection equipment  (Part of our equipment)

Equipment and inspection equipment

Equipment name
Manufacturer/Model name
Network
Analyzer
Agilent Technologies Medel:E5061A 300kHz-1.5GHz
Impedance
Analyzer
MKS V/I Probe VI-PROBE-350-10 1-60HMHz
Power MeterBIAD 4421 IEEE488 / RS-232 Serial Interface (Standard) 4 Pes
Power sensor
BIRD MODEL 4021 1.8-32MHz 0.3-1000W 1 Pc
BIRD MODEL 4024 1.5-32MHz 3W-10kW 2Pcs
BIRD MODEL 4025 100-2500Hz 3W-10kW 1Pc
BIRD MODEL 4027A10M 10-15MHz 3W-10kW 1Pc
Dummy Load
BIAD MODEL 8890-300 50Ω 2500W 1Pc
BIAD MODEL 8890-300-115Blower 50Ω 3000W 1Pc
BIAD MOEDL 8921SC13 50Ω 5kW 1Pc
BIAD MODEL 8730A 50Ω 10kW 2Pc
BIAD MODEL 8745 50Ω 20kW 1Pc 
Programmable
PC power 
Advantest Model: R6144 Voltege / Current Generator
LCR MeterNF Model: ZM2353 40Hz-200kHz
Frequency
Counter
A & D Model: AD-5184 1.5GHz
Scope codaYOKOGAWA Model: DL750
Digtai
Oscilloscope
Agilent U1604A 40Mhz 200M Sa / s
KENWOOD DCS-7040 2ch 40Mhz
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